Hwa Soo Kim, Young Man Cho,: Design and modeling of a novel 3-DOF precision micro-stage. i4, 1– 9 (2003), Google Scholar Crossref IEEE Transactions on Robotics And Automation, VOL. Byung-Ju Yi, Goo Bong Chung, Heung Yeol Na, Whee Kuk Kim, Hong Suh.: Design and experiment of a 3-DOF Parallel Micromechanism Utilizing Flexure Hinges. Journal of Material Processing Technology. Gandhi,: Opto-mechanical Scanning Systems for Microstereolithography (MSL): Analysis and Experimental Verification. Mechatronics 19, 562– 570 (2009), Google Scholar Crossref Dongwoo Kang, Kihyun Kim, Dongmin Kim, Jongyoup Shim, Dae-Gab Gweon, Jaehwa Jeong: Optimal design of highprecision XY-scanner with nanometer-level resolution and millimeter-level working range. X: 100, 300, 500-P-290: Piezo-Z nanopositiner stage. Abstract: An effort made towards the performance improvement for an XY micromanipulator featuring parallel architecture and flexure hinges has been. XY: 15-P-603: Piezo Flexure Nanopositioning Actuator. Friction and stiction are entirely eliminated, and flexures exhibit high stiffness, load capacity and resistance to shock and vibration. 47, 946– 961, (2007), Google Scholar Crossref Flexure motion is based on the elastic deformation (flexing) of a solid material. International Journal of Machine Tools & Manufacture. Ferreira: Design analysis fabrication and testing of a parallel-kinematic micropositioning XY stage. Slocum: Constraint-based Design of Parallel Kinematic XY Flexure Mechanisms. Shrishail Sollapur, Suhas Deshmukh: X Y Scanning Mechanism A Dynamic Approach Int. Awatar, “ Synthesis and analysis of parallel kinematic XY flexure mechanism”, PhD Thesis, Massachusetts Institute of Technology, Cambridge, MA, (2004). Further experimental Results and Analytical Results are compared and minimum deviation is found. Experimental set-up consists of Flexural mechanism, Dial Gauge, Weight Pan and Weights, Pulley, String, Small metal strip, Optical Bread Board etc. The resultant displacement is measured on Dial Gauge Indicator. Further Mechanism is actuated with the help of weight pan and weights. Static Analysis of mechanism is carried out on FEA tool to determine static deflection of motion stage. Modelling of flexural mechanism to provide accurate scanning of comparatively larger range at a higher speed. The merits of using flexure is complete mechanism can be from single monolith. It is relatively compact in design as compared to rigid link mechanism. This mechanism offers zero backlash, frictionless motion and high order repeatability. A flexural mechanism generates relative motion between fixed support and motion stage using flexibility of material. Planer XY Flexurel Mechanisms has various applications in precision motion mechanisms.
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